1. Adopts an open structure, which is convenient for disassembly and maintenance;
2. Built-in grating or magnetic grating feedback system, the resolution is 0.1um, 0.5um, 1um, 5um for optional;
3. Adopt moving magnet flat linear motor;
4. Repeat accuracy up to ±1um;
5. Small size and simple structure, which is suitable for light load and high precision occasions;
6. Quickly assemble to XY cross stages;
