Features:
1. Continuous thrust: 3.5N.m
2. Max. load: 2.4kg
Brand:
HAN'S MOTOROrder(MOQ):
1Product name:XY micro linear positioning platform miniature square linear motor stage for semiconductor equipment
Characteristic:
1. Fast response, higher acceleration (up to 25G) and shorter settling time, increase production efficiency.
2. High speed, up to 5m/s, reduce the production cycle.
3. High rigidity, direct drive load, no need for mechanical transmission such as gears, belts, ball screws etc.
4. High accuracy, direct measurement system, no distance/Angle conversion required.
5. No backlash, directly coupled power driven load, no mechanical conversion.
Motor and Stage Specifications
Model: |
LMA65-10-XXX-A |
|
G01 |
Grating feedback, resolution: 0.1μm |
|
G05 |
Grating feedback, resolution: 0.5μm |
|
Motor specifications |
||
|
Units | Value |
Continuous Force (Tmax) |
N | 3.5 |
Peak Force |
N | 24.5 |
Motor Constant |
N√W |
1.82 |
Max.Continuous Power Dissipation |
W | 3.68 |
Continuous Current (Tmax) |
Arms | 0.6 |
Peak Current (1S) |
Arms |
4.2 |
Force Constant (25℃,±5%) |
N/Arms |
5.8 |
Back EMF Constant (25℃,±5%) |
Vrms/m/s | 1.9 |
Electrical Resistance(25℃,±5%)P-P |
Ω |
4.87 |
Inductance(25℃,±20%)P-P |
μm |
0.1 |
Max Coil Temperature |
℃ |
120 |
Polar Distance (N-N) (360℃ Electrical cycle) |
mm | 36 |
Magnetic Attraction |
N | 67 |
Stage specifications |
||
|
Units | Value |
Max. Load |
kg | 2.4 |
Effective Stroke |
mm | 10 |
Resolution |
μm |
0.1 |
Max.Speed(1) |
mm/s | 270 |
Repeat accuracy |
μm |
±0.5 |
Weight |
kg | 0.25 |
Working environment temperature
and humidity
|
0-40℃、20-80%RH |
Installation dimensions
Appliaction Case
Assembly into XY cross stage and applied in wire bonder.
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Packaging & Delivery
Packaging Details.: plywood packing