1. Standard aluminum base
2. Driven by linear motor, the mover and stator operates without contact
3. Grating Positioning/Magnetic Grating Positioning
4. High precision, high acceleration, high moving speed
5. Zero backlash error
6. Repeatability accuracy up to ±2um (within any 500mm stroke)
7. Long stroke, the maximum stroke reaches more than 4m
8. Allows multiple independent movers on the same axis
9. The maximum moving speed is more than 5m
10. Quickly assemble to XY cross stages and gantry stages
A total of 1 pages