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High precision linear stage

High precision minuature linear stage for precision microassembly

Features:

1. Max. Playload 2.5kg

2. Effective travel 25mm


3. Max. speed 300mm/s

4. Repeated accuracy ±0.5μm

  • Brand:

    HAN'S MOTOR
  • Order(MOQ):

    1
Product Detail

Product name:High precision minuature linear stage for precision microassembly


Precision-class miniature linear stage

The miniature linear stage has an ironless linear motor that ensures smooth running. The combination of stress-relieved aluminum base ensures good performance data. Built-in high precision grating, repeated accuracy up to ±1μm.

Application fields

Industry and research. Metrology. Photonics and precision scanning in semiconductor or flat panel display manufacturing.

Motor and Stage Specifications

Model: LMA55-25-XXX-A
G01    
Grating feedback, resolution: 0.1μm
G05
Grating feedback, resolution: 0.5μm
Motor specifications

            Units                     Value        
Continuous Force (Tmax)
N 8
Peak Force
N 32
Motor Constant
N√W
1.74
Max.Continuous Power Dissipation
W 21.1
Continuous Current (Tmax)
Arms 0.8
Peak Current (1S)
Arms
3.2
Force Constant (25℃,±5%)
N/Arms
10.0
Back EMF Constant (25℃,±5%)
Vrms/m/s 3.3
Electrical Resistance(25℃,±5%)P-P
Ω
15.7
Inductance(25℃,±20%)P-P
μm
0.43
Max Coil Temperature

120
Polar Distance (N-N) (360℃ Electrical cycle)
mm 36
Magnetic Attraction
N 84


Stage specifications

        Units               Value      
Max. Load
kg 3.5
Effective Stroke
mm 25
Resolution
μm
0.1
Max.Speed(1)
mm/s 700
Repeat accuracy
μm
±0.5
Weight
kg 0.5
Working environment temperature 
and humidity
0-40℃、20-80%RH 


Dimensions

High precision linear stage


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High precision linear stage

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High precision linear stage

Company Qualification

High precision linear stage

Inventive Patent

High precision linear stage

Honor

High precision linear stage


Packaging & Delivery 

Packaging Details.: plywood packing 
Port.: Shenzhen ( Sea / Air shipping, TNT, UPS, FedEx and DHL ect.)
Leading time: According to the order quantity, 10 days for the small order and 20 days for the bulk order
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