Features:
1. Max. Playload 2.5kg
2. Effective travel 25mm
3. Max. speed 300mm/s
4. Repeated accuracy ±0.5μm
Brand:
HAN'S MOTOROrder(MOQ):
1Product name:High precision minuature linear stage for precision microassembly
Precision-class
miniature linear stage
The miniature
linear stage has an ironless linear motor that ensures smooth running. The
combination of stress-relieved aluminum base ensures good performance data. Built-in
high precision grating, repeated accuracy up to ±1μm.
Application fields
Industry and
research. Metrology. Photonics and precision scanning in semiconductor or flat
panel display manufacturing.
Motor and Stage Specifications
Model: |
LMA55-25-XXX-A |
|
G01 |
Grating feedback, resolution: 0.1μm |
|
G05 |
Grating feedback, resolution: 0.5μm |
|
Motor specifications |
||
|
Units | Value |
Continuous Force (Tmax) |
N | 8 |
Peak Force |
N | 32 |
Motor Constant |
N√W |
1.74 |
Max.Continuous Power Dissipation |
W | 21.1 |
Continuous Current (Tmax) |
Arms | 0.8 |
Peak Current (1S) |
Arms |
3.2 |
Force Constant (25℃,±5%) |
N/Arms |
10.0 |
Back EMF Constant (25℃,±5%) |
Vrms/m/s | 3.3 |
Electrical Resistance(25℃,±5%)P-P |
Ω |
15.7 |
Inductance(25℃,±20%)P-P |
μm |
0.43 |
Max Coil Temperature |
℃ |
120 |
Polar Distance (N-N) (360℃ Electrical cycle) |
mm | 36 |
Magnetic Attraction |
N | 84 |
Stage specifications |
||
|
Units | Value |
Max. Load |
kg | 3.5 |
Effective Stroke |
mm | 25 |
Resolution |
μm |
0.1 |
Max.Speed(1) |
mm/s | 700 |
Repeat accuracy |
μm |
±0.5 |
Weight |
kg | 0.5 |
Working environment temperature
and humidity
|
0-40℃、20-80%RH |
Dimensions
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Qualification
Inventive Patent
Honor
Packaging & Delivery
Packaging Details.: plywood packing