Product features：

High speed: through direct drive to achieve the high precision positioning and high speed at the same time；

Ultra-long stroke: adopt the C-Lube self-lubricating linear guide in the form of butt joints to realize the ultra-long stroke that only the linear motor drive;

Built-in optical grating or magnetic grating feedback system, resolution 0.1μm, 0.5μm, 1μm, 5μm for a good choice;

Effective stroke of moving stage 100-2500mm for optional.

Product features：

Compact structure, ultra-thin type ac motor module, which adopt the self-lubricating linear guide and small encoder to achieve ultra-thin thickness 30mm;

By direct drive and advanced servo technology to achieve the high speed stability ;

Effective stroke of mechanical stand moving platform 100-1200mm

Product features：

High accuracy, high precision machining and component assembly of motorized xyz stage to achieve a repeatability accuracy±0.5μm;

Steel structure;

High-precision polished mounting surface;

By configuring optical linear encoders on the X-axis and Z-axis for full closed-loop control; high resolution and high responsiveness have achieved high-speed positioning of linear stage motor.

Application:

1. Semiconductor industry and electronic components;

2. Medicine and life sciences in the medical industry;

3. Industrial quality assurance, optical metrology, such as surface inspection;